| 摘要 |
PROBLEM TO BE SOLVED: To provide a silent discharge ozone generator wherein a dielectric layer is formed on the surface of either an earth electrode or a high-voltage electrode and an insulated gap support can be relatively easily and securely formed on the surface of the dielectric layer. SOLUTION: In the silent discharge ozone generator, the earth electrode tube 1 made of a metal and the high-voltage electrode tube 3 made of a metal serve as an outer electrode and an inner electrode, respectively, of two coaxially arranged cylindrical electrodes. A dielectric 12 is applied to the outer surface of the high-voltage electrode tube 3, and a discharge space is formed between the earth electrode tube 1 and the high-voltage electrode tube 3. Ozone is produced by applying an alternating voltage to both of the electrode tubes and passing an oxygen-containing gas through the discharge space to generate silent discharge. Here, the support 6 for securing the discharge space is established by fixing a ceramic inorganic insulator 13 onto a dielectric material of the dielectric surface of the high-voltage electrode tube 3. COPYRIGHT: (C)2006,JPO&NCIPI
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