| 摘要 |
PROBLEM TO BE SOLVED: To shorten the measurement time, required for simultaneously measuring a plurality of objects, to be measured. SOLUTION: Measurement points indicating the destination of heads 20 and 22 are set, and on the basis of the coordinates of the set measuring points, a Y-axis driving part 26 is driven to move the whole heads 20 and 22 to the vicinity of the measurement points. Then images photographed by cameras mounted to the heads 20 and 22 are processed. On the basis of results of the processing, the heads 20 and 22 are each moved asymmetrically along a frame 12 for an X axis and moved slightly along a Y1S-axis or a Y2S-axis. The heads 20 and 22 are each positioned to the measuring positions. Then a PC30 processes the images imaged by the cameras 54 mounted to the heads 20 and 22, and micro-size of patterns of a flat panel 42 on a measuring table 18 are measured. COPYRIGHT: (C)2006,JPO&NCIPI
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