发明名称 MEMS actuator and method of manufacture for MEMS particle sorting device
摘要 A micromechanical particle sorting chip uses an actuator divided into two parts to direct a component of interest into one of a plurality of possible exit paths, based on detection of a fluorescent signal emanating from the component of interest. The two-part actuator may include a force-generating portion and a microactuator portion. The microactuator portion may be disposable, whereas the force-generating portion may be reuseable. By bringing the force-generating portion into proximity to the microactuator portion, the microactuator is induced to move, thereby separating the component of interest from the rest of the fluid stream. The force-generating portion and the microactuator portion may be optimized and fabricated separately, thereby leading to faster, more reliable and less expensive particle sorting.
申请公布号 US2006062698(A1) 申请公布日期 2006.03.23
申请号 US20050260367 申请日期 2005.10.28
申请人 INNOVATIVE MICRO TECHNOLOGY 发明人 FOSTER JOHN S.;HARLEY JOHN C.;HOVEY STEVEN H.;MARTIN RICHARD T.;NGUYEN HUNG D.;RUBEL PAUL J.
分类号 B01L3/00;A61M1/36;C12M1/34;C12Q1/00;G01N15/02;G01N21/05;G01N21/64;H01L21/00 主分类号 B01L3/00
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