SENSOR-EQUIPPED JOINT MEMBER

摘要

A joint member which makes it possible to provide a integrated fluid control device having a reduced number of parts and which has been further compacted in size. A sensor-equipped joint member (10) comprises a passage block (41) formed with a V-shaped passage (41a) for connecting the lower openings in adjacent fluid controllers (16, 20), and a pressure sensor (42) installed in the lateral surface of the passage block (41). The passage block (41) is formed with a branch passage (41b) branching from the V-shaped passage (41a) and leading to the pressure sensor (42).