| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide the process handling technology that improves the productivity by shortening a carriage cycle, maintains low cost by minimizing additional mechanism, ensures long time for process handling and provides reliable electronic components. <P>SOLUTION: This process handling equipment comprises two process mechanisms 21 and 22 and multiple absorption nozzle 10 in transportation direction. It is also provided with a supply unit for feeding a semiconductor device S to an absorption nozzle 10 each time the absorption nozzle 10 stop multiple times. Nozzles 10, which comes to the corresponding positions of the process mechanisms 21 and 22 each time the nozzle stops, include a nozzle for passing the semiconductor device S to either of the process mechanisms 21 and 22 once per multiple stops and a nozzle for receiving the semiconductor device S treated once per multiple stops from the other of the above process mechanisms 21 and 22. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
