| 摘要 |
PROBLEM TO BE SOLVED: To provide a pyrolysis furnace having a structure of a ramping region improved so that the time required for preheating a precursor, i.e., source gas, is minimized to improve the pyrolysis characteristics of the precursor. SOLUTION: The pyrolysis furnace is provided with a body 31 of the pyrolysis furnace; a heating unit 33 formed in the periphery of the body of the pyrolysis furnace for regulating the temperature of the body of the pyrolysis furnace; at least one gas-supplying tube 32 for supplying the source gas into the body of the pyrolysis furnace; and a gas flow path regulating section 34a installed in the body of the pyrolysis furnace for regulating the flow of the source gas. As a result, control and easy manufacture of small-sized nanoparticles having superior characteristics are facilitated. COPYRIGHT: (C)2006,JPO&NCIPI
|
