发明名称 |
Negative-working photoimageable bottom antireflective coating |
摘要 |
The present invention relates to novel negative-working, photoimageable, and aqueous developable antireflective coating compositions and their use in image processing by forming a thin layer of the novel antireflective coating composition between a reflective substrate and a photoresist coating. The negative bottom photoimageable antireflective coating composition is capable of being developed in an alkaline developer and is coated below a negative photoresist.
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申请公布号 |
US2006063105(A1) |
申请公布日期 |
2006.03.23 |
申请号 |
US20050260761 |
申请日期 |
2005.10.27 |
申请人 |
OBERLANDER JOSEPH E;DAMMEL RALPH R;DING-LEE SHUJI;NEISSER MARK O;TOUKHY MEDHAT A |
发明人 |
OBERLANDER JOSEPH E.;DAMMEL RALPH R.;DING-LEE SHUJI;NEISSER MARK O.;TOUKHY MEDHAT A. |
分类号 |
G03F7/004;G03F7/11;G03F7/00;G03F7/038;G03F7/09;G03F7/095;H01L21/027 |
主分类号 |
G03F7/004 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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