| 摘要 |
<p>A vibration isolation table device, comprising a ceiling board in direct or indirect contact with an object to be vibration-isolated, a suspending plate suspending from the peripheral edge of the ceiling board, and a foundation part covered on these ceiling board and the suspending plate. A vertical fluid spring and a fluid bearing are installed between the inner surface of the ceiling board and the foundation part in this order from the foundation part toward the inner surface of the ceiling board, and a horizontal fluid spring is installed between the inner surface of at least one suspending plate and the foundation part so that the device can be operated in such a very soft state that a friction in the horizontal direction is approximately zero by raising the ceiling board in the state of non-contact by the fluid bearing after the ceiling board and the suspending plate are raised by the vertical fluid spring and leveled. Thus, the device can have soft spring characteristics in the vertical and horizontal directions and excellent stability in positioning.</p> |
