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发明名称
Plasma enhanced chemical vapor deposition apparatus and method
摘要
申请公布号
AU2004323359(A1)
申请公布日期
2006.03.23
申请号
AU20040323359
申请日期
2004.09.14
申请人
GEN 3 SOLAR, INC.
发明人
MARVIN S. KESHNER;PAUL H. MCCLELLAND
分类号
C23C16/54
主分类号
C23C16/54
代理机构
代理人
主权项
地址
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