发明名称 PATTERNED THIN FILM GRAPHITE DEVICES
摘要 In a method of making graphite devices, a preselected crystal face of a crystal is annealed to create a thin-film graphitic layer disposed against selected face. A preselected pattern is generated on the thin-film graphitic layer. A functional structure includes a crystalline substrate having a preselected crystal face. A thin-film graphitic layer is disposed on the preselected crystal face. The thin-film graphitic layer is patterned so as to define at least one functional structure.
申请公布号 EP1636829(A2) 申请公布日期 2006.03.22
申请号 EP20040776253 申请日期 2004.06.03
申请人 GEORGIA TECHNOLOGY RESEARCH CORPORATION 发明人 DEHEER, WALT;BERGER, CLAIRE;FIRST, PHILLIP
分类号 H01L21/04;B32B9/00;H01L;H01L21/302;H01L21/461;H01L29/16;H01L29/772;H01L29/778 主分类号 H01L21/04
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