发明名称 |
FLUIDIC MEMS DEVICE |
摘要 |
<p>A fluidic micro electro-mechanical system (MEMS) device is described. In one aspect, at least one at least partially covered fluidic channel is formed between a polymer layer and a polymer substrate as the polymer layer is deposited on the substrate. The partially covered fluidic channel is fabricated as a unitary polymer layer structure. In one implementation, a strong exposure process is applied to the polymer layer to create a deep cross-linked polymer region. A weak exposure process is applied to the polymer layer to create a shallow cross-linked polymer region.</p> |
申请公布号 |
EP1635947(A2) |
申请公布日期 |
2006.03.22 |
申请号 |
EP20040755029 |
申请日期 |
2004.06.10 |
申请人 |
HEWLETT-PACKARD DEVELOPMENT COMPANY, L.P. |
发明人 |
CHEN, CHIEN-HUA;YANG, XIAOFENG |
分类号 |
B01D57/02;B01D61/18;B01D63/08;B01D67/00;B01J19/00;B01L3/00;B01L7/00;B01L99/00;B81C1/00;F04B19/24;F04B43/04;G01N21/05;(IPC1-7):B01L3/00 |
主分类号 |
B01D57/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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