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发明名称
CHARGING VOLTAGE MEASURING DEVICE FOR SUBSTRATE AND ION BEAM IRRADIATING DEVICE
摘要
申请公布号
KR100563334(B1)
申请公布日期
2006.03.22
申请号
KR20030064675
申请日期
2003.09.18
申请人
发明人
分类号
H01L21/26;G01R29/24;H01J37/317
主分类号
H01L21/26
代理机构
代理人
主权项
地址
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