发明名称 |
INJECTION SEEDED F 2? LASER WITH PRE-INJECTED FILTER |
摘要 |
A narrow band F2 laser system useful for integrated circuit lithography. An output beam from a first F2 laser gain medium is filtered with a pre-gain filter to produce a seed beam having a bandwidth of about 0.1 pm or less. The seed beam is amplified in a power gain stage which includes a second F2 laser gain medium. The output beam of the system is a pulsed laser beam with a full width half maximum band width of about 0.1 pm or less with pulse energy in excess of about 5 mJ. In a preferred embodiment the pre-gain filter includes a wavelength monitor which permits feedback control over the centerline wavelength so that the pre-gain filter optics can be adjusted to ensure that the desired bandwidth range is injected into the power gain stage. |
申请公布号 |
EP1378035(A4) |
申请公布日期 |
2006.03.22 |
申请号 |
EP20020721677 |
申请日期 |
2002.04.04 |
申请人 |
CYMER, INC. |
发明人 |
SANDSTROM, RICHARD, L.;PARTLO, WILLIAM, N.;ONKELS, ECKEHARD, D. |
分类号 |
H01L21/027;G03F7/20;H01S3/03;H01S3/036;H01S3/038;H01S3/041;H01S3/08;H01S3/0943;H01S3/097;H01S3/0971;H01S3/102;H01S3/139;H01S3/22;H01S3/223;H01S3/225;H01S3/23 |
主分类号 |
H01L21/027 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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