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发明名称
MAGAZINE FOR LOADING SUBSTRATE
摘要
申请公布号
KR20060025779(A)
申请公布日期
2006.03.22
申请号
KR20040074585
申请日期
2004.09.17
申请人
SAMSUNG ELECTRONICS CO., LTD.
发明人
JOO, HOON SOUNG;KIM, DAE SOO;KIM, DONG BIN;HONG, SUNG BOK
分类号
H01L21/68
主分类号
H01L21/68
代理机构
代理人
主权项
地址
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