Method and structure for fabricating sensors with a sacrificial gel dome

摘要

A method and structure that protects interior electrical components of a pressure sensor ( 4 ) from corrosive particles using a sacrificial gel dome ( 30 ) to form a vent ( 34 ) in a protective gel ( 32 ) that covers electrical components that can be corroded such as wires ( 16 ), bond pads ( 18 ), and electrical leads ( 14 ). Sacrificial gel dome ( 30 ) is dispensed over a diaphragm ( 28 ) of pressure sensor ( 4 ) to form vent ( 34 ) enabling diaphragm ( 28 ) to sense pressure variations without the influence of protective gel ( 32 ). Sacrificial gel dome ( 30 ) is removed through a water rinsing process ( 42 ) to expose vent ( 34 ).