发明名称 Optical measurement apparatus and method
摘要 A modulation spectroscopy system ( 1 ) directs a probe beam ( 11 ) onto a sample ( 10 ), the reflected probe beam being collected by a collector ( 7 ) and processed by a detector ( 8 ). A pump beam generated by a source ( 4, 5 ) directs a pump beam ( 13 ) onto the sample at the same spot as the probe beam. However, it also switches the pump beam via a path ( 14 ) onto an adjacent location not overlapping the probe spot. This is referred to as spatial modulation. A cylindrical lens ( 16 ) in the collection subsystem ( 7 ) collects reflected light including luminescence from both pump beam spots simultaneously, so that the luminescence becomes a d.c. signal which can be easily eliminated, including means from the modulator for varying pump beam intensities and positions. This provides means to reject the unwanted background luminescence signal as well as improvement to the signal to noise ratio.
申请公布号 US7016044(B2) 申请公布日期 2006.03.21
申请号 US20050136531 申请日期 2005.05.25
申请人 OPTICAL METROLOGY PATENTS LIMITED 发明人 MURTAGH MARTIN EDWARD;KELLY PATRICK VINCENT
分类号 G01N21/00;G01N21/17 主分类号 G01N21/00
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