发明名称 Carrying vehicle, manufacturing apparatus, and carrying system
摘要 According to the present invention, in a carrying system comprising a carrying vehicle and a manufacturing apparatus the interior of which is kept cleaner than a surrounding environment, manufactured articles to be transferred are prevented from being contaminated by foreign matter or the like attached to transfer ports. A carrying vehicle includes a running unit 14 that runs along a predetermined carrying path, a cleaning unit 12 that supplies cleaned air, a housing section 13 to which the cleaned air is supplied and in which manufactured articles are housed, a transfer port 11 which is formed in a side of a housing and through which a manufactured article is loaded into or unloaded from the housing section 13 , and an air injecting section 19 A that blows out air toward the transfer port 11.
申请公布号 US7014672(B2) 申请公布日期 2006.03.21
申请号 US20030462732 申请日期 2003.06.17
申请人 MURATA KIKAI KABUSHIKI KAISHA 发明人 ISHIHARA HIROYUKI;SHIMIZU TAKAO;NAKAO TAKASHI;TAHARA RYOSUKE;TAKEUCHI HIDETOSHI
分类号 B01D46/10;H01L21/68;B01D50/00;B65B1/04;H01L21/00;H01L21/677 主分类号 B01D46/10
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