发明名称 Method of simultaneously making a pair of transistors with insulated gates having respectively a thin oxide and a thick oxide, and corresponding integrated circuit comprising such a pair of transistors
摘要 A method of simultaneously fabricating a pair of insulated gate transistors respectively having a thin oxide and a thick oxide, and an integrated circuit including a pair of transistors of this kind. Forming low-doped NLDD areas of the thin oxide second transistor includes implanting a first dopant having a first concentration and implanting a second dopant having a second concentration lower than the first concentration. Forming low-doped areas NLDD of the first, thick oxide transistor includes only said implantation of the second dopant.
申请公布号 US7015105(B2) 申请公布日期 2006.03.21
申请号 US20020169237 申请日期 2002.06.27
申请人 STMICROELECTRONICS, S.A. 发明人 BOISSONNET LAURENCE;GOLANSKI DOMINIQUE;RAUBER BRUNO;GRANIER ANDRE
分类号 H01L21/8234;H01L21/265;H01L21/336;H01L27/088 主分类号 H01L21/8234
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