发明名称 Purging light beam paths in optical equipment
摘要 Purging of a light beam path in an effective manner that minimizes the affect of the purging requirement on system throughput. In one embodiment, the invention is incorporated into a birefringence measurement system that has several components for directing light through a sample optical element and thereafter detecting and analyzing the light. The segment of the beam path through the sample is isolated to reduce the volume that requires continual purging.
申请公布号 US7016039(B2) 申请公布日期 2006.03.21
申请号 US20030364006 申请日期 2003.02.10
申请人 HINDS INSTRUMENTS, INC. 发明人 BRENINGER ANDREW O.;GRIFFITHS CHRISTOPHER O.;MARK DOUGLAS C.;MIKHEYEV ARTEMIY;WANG BAOLIANG
分类号 G01J4/00;G01N21/23 主分类号 G01J4/00
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