发明名称 |
Method for fabricating an interference display unit |
摘要 |
An interference display unit with a first electrode, a second electrode and posts located between the two electrodes is provided. The characteristic of the interference display unit is that the second electrode's stress is released through a thermal process. The position of the second electrode is shifted and the distance between the first electrode and the second electrode is therefore defined. A method for fabricating the structure described as follow. A first electrode and a sacrificial layer are sequentially formed on a substrate and at least two openings are formed in the first electrode and the sacrificial layer. A supporter is formed in the opening and the supporter may have at least one arm on the top portion of the supporter. A second electrode is formed on the sacrificial layer and the supporter and a thermal process is performed. Finally, The sacrificial layer is removed.
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申请公布号 |
US7016095(B2) |
申请公布日期 |
2006.03.21 |
申请号 |
US20050069938 |
申请日期 |
2005.03.03 |
申请人 |
PRIME VIEW INTERNATIONAL CO., LTD. |
发明人 |
LIN WEN-JIAN |
分类号 |
G02F1/03;G02F1/1343;B81B3/00;B81C1/00;G02B5/20;G02B5/28;G02B26/00;G02F1/07 |
主分类号 |
G02F1/03 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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