发明名称 Exposure device
摘要 The invention provides an exposure device that can conduct digital exposure with high precision and with a high light-use efficiency using evanescent light. Light that is modulated by a DMD and condensed by a microlens array is incident at corresponding optical fiber cores arranged in a matrix in an evanescent array head, and is guided through the insides of the optical fibers. Because the light condensed by the microlens array is incident at the optical fiber cores corresponding to the microlenses, the light can be efficiently incident. Evanescent light leaks out from micro-openings formed in emission-side end portions of the optical fibers, and a photosensitive material is exposed by this evanescent light.
申请公布号 US7016018(B2) 申请公布日期 2006.03.21
申请号 US20040859087 申请日期 2004.06.03
申请人 发明人
分类号 G03B27/54;G03B27/42 主分类号 G03B27/54
代理机构 代理人
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