| 摘要 |
A stage apparatus includes a guide provided with a surface including a magnetic body, a moving body movable along the surface, a gas bearing for supporting the moving body with respect to the surface, and a magnet which is supplied to the moving body and produces a magnetic attractive force with the magnetic body. The surface of the guide has edges to define its size in a width direction, which is orthogonal to a traveling direction of the moving body to limit movement of the moving body in the width direction, using a magnetic attractive force of the magnet in a direction parallel to the surface, and to apply pre-pressure to the gas bearing. |
