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发明名称
GROWTH PREVENTION METHOD FOR NATURAL OXIDE ON SEMICONDUCTOR WAFER
摘要
申请公布号
KR20060025041(A)
申请公布日期
2006.03.20
申请号
KR20040073943
申请日期
2004.09.15
申请人
HYNIX SEMICONDUCTOR INC.
发明人
LEE, LAE HEE
分类号
H01L21/02;H01L21/31
主分类号
H01L21/02
代理机构
代理人
主权项
地址
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