发明名称 METHOD FOR THE SOLDER-STOP STRUCTURING OF ELEVATIONS ON WAFERS
摘要 Process for solder-stop structuring protrusions on wafers (3) such as three dimensional contact structures (1) in the form of elastic or flexible contact bumps comprises depositing a resist on the tip of the three dimensional structure, depositing a solder-stop layer over a metallization including the resist, and removing the resist on the tip of the three dimensional structure including the solder-stop layer covering it.
申请公布号 KR100562591(B1) 申请公布日期 2006.03.17
申请号 KR20030061724 申请日期 2003.09.04
申请人 发明人
分类号 H01L21/44;H01L21/60;H01L23/485 主分类号 H01L21/44
代理机构 代理人
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