发明名称 |
FIELD EMISSION DEVICE AND METHOD FOR MANUFACTURING THE SAME |
摘要 |
<p>A Field Emission Device (FED) and its method of manufacture includes: forming a substrate; forming a cathode having a cathode aperture on an upper surface of the substrate; forming a material layer having a first through hole with a smaller diameter than that of the cathode aperture on an upper surface of the cathode; forming a first insulator having a first cavity on an upper surface of the material layer; forming a gate electrode having a second through hole on an upper surface of the first insulator; and forming an emitter in a central portion of the cathode aperture.</p> |
申请公布号 |
KR20060024565(A) |
申请公布日期 |
2006.03.17 |
申请号 |
KR20040073365 |
申请日期 |
2004.09.14 |
申请人 |
SAMSUNG SDI CO., LTD. |
发明人 |
KANG, HO SUK;CHOI, JUN HEE;SONG, BYONG GWON;KIM, HA JONG |
分类号 |
H01J1/30 |
主分类号 |
H01J1/30 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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