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发明名称
METHOD OF DETECTING GLASS SUBSTRATE FOR GLASS SUBSTRATE TRANSFERRING ROBOT WITH DUAL ARM
摘要
申请公布号
KR20060024654(A)
申请公布日期
2006.03.17
申请号
KR20040073475
申请日期
2004.09.14
申请人
BROOKS AUTOMATION ASIA LTD.
发明人
KIL, YOUNG NAM;KANG, JAE HO
分类号
G02F1/13
主分类号
G02F1/13
代理机构
代理人
主权项
地址
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