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发明名称
金属及阻障层之完整电化学机械研磨方法
摘要
本发明揭示一种用于对金属及阻障材料进行电化学处理之方法及装置。在一实施例中,一种用以对基板进行电化学处理之方法,至少包含以下步骤:经由一位于该基板上方之曝露阻障材料层与一电极间之电解液,建立一导电路径,以小于约2磅/平方英寸之力,推压该基板使抵靠着一处理整组件,在该彼此接触之基板与垫姐件之间产生相对运动,及在一第一电化学处理步骤期间,在一阻障层处理工作台中,以电化学方式移除该曝露层之一部份。
申请公布号
TW200610045
申请公布日期
2006.03.16
申请号
TW094128637
申请日期
2005.08.22
申请人
应用材料股份有限公司
发明人
毛大新;贾仁合;王志弘;田园;刘凤全;卡伯特渥第麦尔;柯圣豪;蔡东辰;陈良毓;胡永其
分类号
H01L21/302
主分类号
H01L21/302
代理机构
代理人
蔡坤财
主权项
地址
美国
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