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发明名称
微影术用洗涤液
摘要
本发明系提供有关光阻图型中,为减少制品的表面缺陷,即所谓缺点,又赋予光阻膜对电子线照射之耐性,抑制图型收缩所使用的新颖之微影术用洗涤液,及使用其之光阻图型之形成方法。由分子构造中含有具氮原子之水溶性树脂所成之溶液调制微影术用洗涤液,使用该液由进行(A)于基板上设置光阻膜之步骤、(B)对该光阻膜藉由光罩图型进行选择性之曝光步骤、(C)曝光后之加热(PEB)处理步骤、(D)硷性显影处理步骤,及(E)使用上述微影术用洗涤液之处理步骤以形成光阻图型。
申请公布号
TW200609691
申请公布日期
2006.03.16
申请号
TW094112944
申请日期
2005.04.22
申请人
东京应化工业股份有限公司
发明人
越山淳;屋和正;金子文武;宫本敦史;泽田佳宏;田岛秀和
分类号
G03F7/32
主分类号
G03F7/32
代理机构
代理人
林志刚
主权项
地址
日本
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