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发明名称
CMP研磨剂以及基底的研磨方法
摘要
本发明系关于一种CMP研磨剂,该CMP研磨剂含有氧化铈粒子、分散剂、水溶性高分子以及水,且上述水溶性高分子为使用阳离子性偶氮化合物及其盐之至少一种作为聚合引发剂,而使含有具有不饱和双键之羧酸以及其盐之至少一种的单体聚合所形成之聚合物。藉此,提供一种在将层间绝缘膜、BPSG膜、浅沟槽隔离用绝缘膜平坦化处理之CMP技术中,可无研磨损伤、有效、高速、均匀地且易于管理研磨制程地进行研磨之研磨剂以及研磨方法。
申请公布号
TW200609337
申请公布日期
2006.03.16
申请号
TW094124651
申请日期
2005.07.21
申请人
日立化成工业股份有限公司
发明人
深正人;小山直之;仓田靖;芳贺浩二;阿久津利明;大槻裕人
分类号
C09K3/14;H01L21/304
主分类号
C09K3/14
代理机构
代理人
詹铭文;萧锡清
主权项
地址
日本
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