| 摘要 |
PROBLEM TO BE SOLVED: To obtain an easily viewable observation image with which blurring occurring in the image is reduced without operating an observation optical system in real time matching the motion of a specimen. SOLUTION: There is provided the observation method comprising, prior to the observation of the observation site B of the specimen, acquiring the image of the specimen surface of the observation region including the observation site B over a prescribed time range, extracting a plurality of feature points by processing the acquired image G of the specimen surface, calculating a motion trajectory Q for each of the extracted feature points over the time range, and disposing the optical axis of the observation optical system at a position where the motion trajectory Q of a feature point disposed in the observation site B is minimized. COPYRIGHT: (C)2006,JPO&NCIPI
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