NANOHOLE ARRAY, MANUFACTURING METHOD THEREOF, COMPOSITE MATERIAL AND MANUFACTURING METHOD THEREOF

摘要

PROBLEM TO BE SOLVED: To provide a technology for manufacturing a nanohole array, the pore period, pore diameter and film thickness of which are controlled with high accuracy. SOLUTION: According to this manufacturing method of a nanohole array, a pore of an anodized porous alumina film is filled with a first material, and further the periphery of the porous alumina film is also covered with the first material. After that, the alumina is removed to manufacture a pillar array structure having upper and lower support layers. A void between pillars of the pillar array structure having the upper and lower support layers is filled with a second material. After that, the pillar array structure is removed to manufacture a nanohole array. This invention further provides a composite material and a manufacturing method thereof using the above nanohole array. COPYRIGHT: (C)2006,JPO&NCIPI