Gas supplying apparatus

摘要

A gas supply apparatus for supplying gaseous raw material of an article to a processing apparatus, including at least one main vessel for storing liquid raw material of the article and supplying the gaseous raw material to the processing apparatus, an auxiliary vessel for storing liquid raw material replenishment for the liquid raw material, a main pipe for delivering the liquid raw material replenishment to the main vessel, a return pipe branched form the main pipe, first and second control valves, and a feed device for feeding, through the main pipe, the liquid raw material replenishment to the main vessel.