发明名称 Thermal electromagnetic radiation detector comprising an absorbent membrane fixed in suspension
摘要 The absorbent membrane of the detector is fixed in suspension by at least one thermally insulating support part onto a front face of a substrate comprising at least two electric connection terminals electrically connected to the membrane, for example by means of conducting layers. The support part has at least one base end and a raised zone. The base end is fixed to a top part of a conducting pillar having a base fixedly secured to one of the electric connection terminals. A substantially flat zone of a bottom face of the membrane is directly in contact with the raised zone of the support part. The support part is preferably formed by a bridge having a second base end fixed to a top part of a second pillar, the raised zone being formed by a flat middle part of the bridge.
申请公布号 US2006054823(A1) 申请公布日期 2006.03.16
申请号 US20050206801 申请日期 2005.08.19
申请人 ULIS 发明人 YON JEAN-JACQUES;ASTIER ASTRID;VILAIN MICHEL
分类号 H01L27/14;G01J5/10;G01J5/20 主分类号 H01L27/14
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