发明名称 |
Thermal electromagnetic radiation detector comprising an absorbent membrane fixed in suspension |
摘要 |
The absorbent membrane of the detector is fixed in suspension by at least one thermally insulating support part onto a front face of a substrate comprising at least two electric connection terminals electrically connected to the membrane, for example by means of conducting layers. The support part has at least one base end and a raised zone. The base end is fixed to a top part of a conducting pillar having a base fixedly secured to one of the electric connection terminals. A substantially flat zone of a bottom face of the membrane is directly in contact with the raised zone of the support part. The support part is preferably formed by a bridge having a second base end fixed to a top part of a second pillar, the raised zone being formed by a flat middle part of the bridge.
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申请公布号 |
US2006054823(A1) |
申请公布日期 |
2006.03.16 |
申请号 |
US20050206801 |
申请日期 |
2005.08.19 |
申请人 |
ULIS |
发明人 |
YON JEAN-JACQUES;ASTIER ASTRID;VILAIN MICHEL |
分类号 |
H01L27/14;G01J5/10;G01J5/20 |
主分类号 |
H01L27/14 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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