发明名称 PATTERN GENERATION METHOD
摘要 <p>According to the convention dummy pattern generation method, a dummy pattern is generated by performing a complicated mask processing after completion of wiring. Accordingly, no timing calculation after the pattern generation is performed. In order to perform the timing calculation, it is necessary to consider the increase of the wiring capacity by the dummy pattern. However, feedback requires quite a time and it is difficult to cope with a timing error. There is provided a pattern generation method including steps of: generating a wiring pattern and a dummy patter in a wiring region of a semiconductor integrated circuit using an automatic arrangement/wiring tool, identifying wiring patterns and dummy patterns in the wiring region of the semiconductor integrated circuit, identifying a net having a difficult timing among the identified wiring patterns, identifying two dummy patterns adjacent to both side of the net having the difficult timing, and removing one of the dummy patterns adjacent to the both sides.</p>
申请公布号 WO2006028066(A1) 申请公布日期 2006.03.16
申请号 WO2005JP16287 申请日期 2005.09.06
申请人 MATSUSHITA ELECTRIC INDUSTRIAL CO., LTD.;NODA, HIROYUKI 发明人 NODA, HIROYUKI
分类号 H01L21/82;G06F17/50;H01L21/3205;H01L21/822;H01L23/52;H01L27/04 主分类号 H01L21/82
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