SENSOR FOR DETECTING SUBSTANCE IN LIQUID AND DEVICE FOR DETECTING SUBSTANCE IN LIQUID EMPLOYING SAME

摘要

A sensor for detecting a substance in a liquid using a surface acoustic wave element in which a small quantity of objective substance in a liquid can be measured with high precision, and a device for detecting a substance in a liquid employing such a sensor. A sensor (1) for detecting a substance in a liquid comprises a base substrate (2) having openings (2a, 2b) and provided with an electrode land on one side, and SAW elements (6, 7) each provided with a sensing part having at least one IDT electrode on one side wherein the SAW elements (6, 7) are mounted by flip-chip bonding using bump electrodes such that the sensing parts thereof face the openings (2a, 2b) of the base substrate (2), and at least one sensing part is covered with a reaction film (13) which is to be coupled with the objective substance.