| 摘要 |
PROBLEM TO BE SOLVED: To make a high power output generation possible concerning an X-ray source utilized as a micro-focus X-ray source. SOLUTION: The X-ray source 1 is equipped with a high voltage power source part 17, an X-ray tube 27, a metal cylinder 29 that is installed protruding from the high voltage power source part 17 and surrounds the X-ray tube 27, and a cabinet 3 that stores this high pressure power source part 17 and the metal cylinder 29. As a cooling fan 55a is installed at the cabinet 3, the metal cylinder 29 housing the X-ray tube 27 that becomes a high temperature can be cooled down efficiently by making the cooling wind flow in the circumference of the metal cylinder 29 in the inner part of the cabinet 3. COPYRIGHT: (C)2006,JPO&NCIPI
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