| 摘要 |
A component for use in a combustion turbine ( 10 ) is provided that includes a substrate ( 212 ) and a microelectromechanical system (MEMS) device ( 50, 250 ) affixed to the substrate ( 212 ). At least one connector ( 52 ) may be deposited in electrical communication with the MEMS device ( 50, 250 ) for routing a data signal from the MEMS device ( 50, 250 ) to a termination location ( 59 ). A barrier coating ( 216 ) may be deposited on the substrate ( 212 ) wherein the MEMS device ( 50, 250 ) is affixed beneath a surface of the barrier coating ( 216 ). A plurality of trenches ( 142 ) may be formed in the barrier coating ( 216 ) at respective different depths below the surface of the barrier coating ( 216 ) and a MEMS device ( 50, 250 ) deposited within each of the plurality of trenches ( 142 ). A monitoring system ( 30 ) is provided that may include a processing module ( 34 ) programmed for receiving data from the MEMS device ( 50, 250 ).
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