发明名称 High electron mobility transistor piezoelectric structures
摘要 Piezoelectric semiconductor structures and methods for fabricating the same are described. In an embodiment, the piezoelectric semiconductor structure includes a support substrate, a channel layer arranged on one side of the support substrate, and a barrier layer formed on the channel layer. The barrier layer is made of alternating binary alloy layers of Type III-Type V semiconductor materials.
申请公布号 US2006054926(A1) 申请公布日期 2006.03.16
申请号 US20040004411 申请日期 2004.12.03
申请人 LAHRECHE HACENE 发明人 LAHRECHE HACENE
分类号 H01L31/0328;H01L29/15;H01L29/20;H01L29/778 主分类号 H01L31/0328
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