| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a cooling device and an aligner which can achieve desired optical performance by cooling directly a light irradiation region, and improving the temperature distribution of an optical element causing the deterioration of imaging performance, and also to provide a method for manufacturing the device. <P>SOLUTION: The cooling device for cooling an optical element located in a vacuum or reduced-pressure environment in a noncontact manner has a radiation cooling source, a concave mirror having a concave surface directed toward the optical element. The radiation cooling source is located nearly at the focal point of the concave surface. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
