| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a manufacturing method of a ceramic substrate capable of obtaining quality equal to or higher than conventional quality and improved in production efficiency by using an extrusion molding machine, wherein a biaxial extruder having a strong kneading capacity and a uniaxial molding machine having molding stability are combined, and continuing a degreasing furnace to a baking furnace. <P>SOLUTION: In the manufacturing method of the ceramic substrate, a ceramic sheet with a thickness of 0.2-10 mm is molded using the extrusion molding machine wherein the discharge port of the biaxial extruder and the raw material supply port of the uniaxial molding machine are connected and passed through a degreasing/baking furnace wherein the degreasing furnace and the baking furnace are connected. The ceramic sheet includes at least one kind of ceramics selected from the group consisting of nitride ceramics, oxide ceramics and carbide ceramics and nitride ceramics are aluminum nitride. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
