SAMPLE HOLDING PROBE AND MANUFACTURING METHOD OF SAMPLE

摘要

PROBLEM TO BE SOLVED: To provide a sample holding probe capable of sufficiently suppressing deformation/denaturation in processing an object to be processed; and to provide a manufacturing method of a sample. SOLUTION: This sample holding probe is provided with a probe body having a sample holding part for holding the sample, and a cooling part for cooling the probe body. COPYRIGHT: (C)2006,JPO&NCIPI