| 摘要 |
PROBLEM TO BE SOLVED: To obtain a compound observation device in which a specific sample can be precisely aligned to an optical axis position, even if the whole region of the sample is observed. SOLUTION: This compound observation device is constituted such that, by a first observation device for observing a comparatively low magnification image, a wide range of the inspecting sample is observed and a specific point desired for detailed observation is found, and data showing the location of the specific point on the sample and the inspecting sample are set on a stage of a second observation device for observing the comparatively high magnification image, and the specific point of the sample is observed in detail by the comparatively high magnification image. The sample movement stage of the first observation device has a large stage which can observe almost the whole region of the surface of the sample by the straight movement of X, Y of the stage, and the second observation device has a sample stage capable of two-dimensional movement in X, Y directions and rotation movement, and by combining the rotation movement and the straight movement of X, Y two directions, almost the whole region of the sample surface can be observed. COPYRIGHT: (C)2006,JPO&NCIPI
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