| 摘要 |
PROBLEM TO BE SOLVED: To provide a nano-thin film thermophysical property measuring method and a measuring device capable of performing easily and simply thermophysical measurement of a thin film of a metal film or an organic film in the several-ten to several-hundred nanometer order. SOLUTION: As pulse light for object excitation, pulse light is used, satisfying inequalities: t<SB>pulse</SB><1/3t<SB>1/2</SB>, t<SB>pulse</SB>>1ns, and t<SB>rep</SB>>15t<SB>1/2</SB>; where, t<SB>pulse</SB>: the pulse width of a laser, t<SB>1/2</SB>: half time (time until arrival to a half of the maximum temperature rise measured by a laser flash method), and t<SB>rep</SB>: irradiation interval time of pulse light for measuring object excitation. COPYRIGHT: (C)2006,JPO&NCIPI
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