发明名称 Plasma treatment for purifying copper or nickel
摘要 A method for treating electronic components made of copper, nickel or alloys thereof or with materials such as brass or plated therewith and includes the steps of arranging the components in a treatment chamber, generating a vacuum in the treatment chamber, introducing oxygen into the treatment chamber, providing a pressure ranging between 10<SUP>-1 </SUP>and 50 mbar in the treatment chamber and exciting a plasma in the chamber, allowing the oxygen radicals to act on the components, generating a vacuum in the treatment chamber, introducing hydrogen into the treatment chamber, providing a pressure ranging between 10<SUP>-1 </SUP>and 50 mbar in the treatment chamber and exciting a plasma in the chamber and allowing the hydrogen radicals to act on the components.
申请公布号 US2006054184(A1) 申请公布日期 2006.03.16
申请号 US20050270256 申请日期 2005.11.08
申请人 MOZETIC MIRAN;CVELBAR UROS 发明人 MOZETIC MIRAN;CVELBAR UROS
分类号 B08B6/00;B08B7/00;B23K1/20;C23G1/00;C23G5/00 主分类号 B08B6/00
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