| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a manufacturing method of a substrate for an electro-optic device with a predetermined pattern easily and accurately obtained, and to provide a developing device of a substrate for an electro-optic device, and a manufacturing method of an electro-optic device. <P>SOLUTION: In the manufacturing method of a substrate for an electro-optic device, the developing device of a substrate for an electro-optic device, and the manufacturing method of an electro-optic device, they comprise the steps of forming a resin layer on the substrate for the electro-optic device by laminating a photo sensitive material, conducting a pattern exposure to the resin layer through a photomask, and forming the predetermined pattern to the resin layer by continuously supplying a developing solution in membrane. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
