| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a manufacturing method for a thin-film transistor (TFT) substrate that can simplify a manufacturing process of a TFT substrate. <P>SOLUTION: The manufacturing method includes the steps of forming a TFT pattern on a substrate 100, forming a protection film 140, forming a photoresist layer, forming a picture element region 150a, forming a picture electrode 170 and an electrically conductive film 160 separated from each other, stripping a photoresist pattern 150 using a stripping composition 184, separating the conductive film 160 formed on the photoresist surface from the substrate 100, and resolving the conductive film separated in a storage tank 186. <P>COPYRIGHT: (C)2006,JPO&NCIPI</p> |
