| 摘要 |
PROBLEM TO BE SOLVED: To provide a manufacturing method of a thin film magnetic head by which both of an MR height and a neck height can be decided precisely. SOLUTION: A plurality of thin film magnetic head bars 600 are formed so as to comprise: a plurality of thin film magnetic head precursors 110; a plurality of RLG sensors 200 for a reproduction head part; and a plurality of RLG sensors 300 for a recording head part. By pre-grinding the thin film magnetic head bars 600 while detecting the electric resistance value of a resistance film 201 by using the RLG sensors 200 and continually detecting the electric resistance values of the resistance films 201 and 301 by using both of the RLG sensors 200 and the RLG sensors 300, the inclination of the grinding surfaces of the thin film magnetic head bars 600 is adjusted. Thereafter, by finish-grinding the thin film magnetic head bars 600 while detecting the electric resistance value of the resistance film 201 by using the RLG sensors 200 again, an air bearing surface is formed. COPYRIGHT: (C)2006,JPO&NCIPI
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