| 摘要 |
PROBLEM TO BE SOLVED: To easily and accurately compensate an error between a calculating value and a real measured value based on an electromagnetic field analysis calculation in a highly reliable manner. SOLUTION: The compensation element for short-circuiting and opening a lead electrode for signals and a lead electrode for GND is provided. Real measured values of an admittance are respectively measured by touching a probe of a measuring instrument onto each electrode of the compensation element. An electromagnetic field analysis model of the compensation element is prepared, and the calculated values of the admittance are respectively obtained at the basis of the electromagnetic field analysis calculation. Upon assuming equivalent circuit of the calculated values which connect the compensated value with the calculated values in series and in parallel, a value of the compensated value which becomes an error is calculated by comparing with the real measured value. The compensation value becomes a value including influence such as contact resistance between the probe of the measuring instrument and the electrode. Consequently, the value approximated to the real measured value can be obtained by considering a calculating value of a device as a design target. COPYRIGHT: (C)2006,JPO&NCIPI
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