| 摘要 |
PROBLEM TO BE SOLVED: To provide a ventilating system for an absolute pressure control chamber, allowing a person to comfortably stay in the chamber. SOLUTION: The absolute pressure control chamber 2 has an air supply passage 41 provided with a blowing means 3 and an exhaust passage 42 provided with an exhaust means 4, in which optical length measuring equipment susceptible to a change in air pressure or the like is arranged. The minimum output values are set for the blowing means 3 and the exhaust means 4. When the target set air pressure in the absolute pressure control chamber 2 is higher than outside air pressure, an air exhaust amount not smaller than a preset amount is secured. When the target set air pressure in the absolute pressure control chamber is not higher than the outside air pressure, an air supply amount not smaller than a preset amount is secured. Thus, the absolute pressure control chamber 2 is ventilated while keeping the air pressure in the absolute pressure control chamber 2 at the target set air pressure. COPYRIGHT: (C)2006,JPO&NCIPI
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