| 摘要 |
PROBLEM TO BE SOLVED: To provide a sample preparing method capable of forming an analytical sample containing a film to be analyzed having a minute film thickness without changing the crystal structure of the film to be analyzed. SOLUTION: After a laminated film 1Z is formed, first and second soluble films 20Z and 30Z are selectively removed partially in its thickness direction using an FIB method so as to respectively leave first and second adjacent parts 23 and 33 adjacent to the film 10 to be analyzed. The first and second adjacent parts 23 and 33 are partially dissolved and removed in its thickness direction using a solvent capable of dissolving the first and second soluble films 20Z and 30Z to further reduce the thicknesses t21 and t31 precisely. By this method, the analytical sample 1 suitable for performing analysis using, for example TEM can be prepared. COPYRIGHT: (C)2006,JPO&NCIPI
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